rus
Issue #6/2025
M. N. Filippov, M. A. Stepovich
Thermal Effect of an Electron Probe on a Sample in Scanning Electron Microscopy and Electron Probe Microanalysis
Thermal Effect of an Electron Probe on a Sample in Scanning Electron Microscopy and Electron Probe Microanalysis
10.22184/2227-572X.2025.15.6.432.441
This article provides a critical review of the current state of research on assessing the thermal impact of an electron probe in scanning electron microscopy and electron probe microanalysis. The focus is on theoretical estimates of the superheat temperature of a sample. Two main areas of research are considered. The first area includes studies based on a rigorous solution to the boundary value problem for the differential equation of heat conduction with a right-hand side that most accurately describes the electron deceleration process in a substance. This area also includes studies using the Monte Carlo method. The second area involves the use of simplified heat generation models, allowing one to obtain analytical expressions for the superheat temperature. Results obtained by various methods are compared.
Tags: electron microscope electron probe microanalysis heat generation by an electron probe mathematical modeling of heat flow генерация тепла электронным зондом математическое моделирование переноса тепла электронно-зондовый микроанализ электронный микроскоп
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This article provides a critical review of the current state of research on assessing the thermal impact of an electron probe in scanning electron microscopy and electron probe microanalysis. The focus is on theoretical estimates of the superheat temperature of a sample. Two main areas of research are considered. The first area includes studies based on a rigorous solution to the boundary value problem for the differential equation of heat conduction with a right-hand side that most accurately describes the electron deceleration process in a substance. This area also includes studies using the Monte Carlo method. The second area involves the use of simplified heat generation models, allowing one to obtain analytical expressions for the superheat temperature. Results obtained by various methods are compared.
Tags: electron microscope electron probe microanalysis heat generation by an electron probe mathematical modeling of heat flow генерация тепла электронным зондом математическое моделирование переноса тепла электронно-зондовый микроанализ электронный микроскоп
Subscribe to the journal Analytics to read the full article.
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